Working with the tool supplier, EPRI develops a test plan, conducts the tests, and makes recommendations to make the tool meet SEMI F47. This approach enables tool
suppliers to understand the performance of their equipment and to make the necessary changes to meet voltage sag standards. Tests are done in accordance with the SEMI
Standard F42: "Test Method for Voltage Sag Susceptibility of Semiconductor Processing Equipment." The voltage-sag hardware allows for testing of loads up to 200 Amp, three
phase. Through subsystem testing, our voltage-sag hardware has been successfully used to test multi-chamber semiconductor tools with loads up to 300 Amps per phase,
EPRI documents the testing with a test report and if the
tool is found to be compliant to SEMI F47, compliance documentation is supplied at no additional charge. We are committed to helping you comply with SEMI F47. We
count your success in meeting the SEMI F47 standard as our success as well.