Onsite Testing

EPRI is known worldwide as a leader in conducting voltage sag testing of semiconductor tools.  Armed with our unique portable test equipment, our engineers can evaluate the ability of semiconductor tools to meet voltage sag performance requirements and comply with the SEMI standard F47: "Specification For Semiconductor Process Equipment Voltage Sag Immunity."

• SemiF47 Compliance Testing (PQ Star)
• Consulting
• Training
• Onsite Testing
• Lab Bench Testing
• Onsite Power Quality Audit
• Sag Generator Product Line

Working with the tool supplier, EPRI develops a test plan, conducts the tests, and makes recommendations to make the tool meet SEMI F47.  This approach enables tool suppliers to understand the performance of their equipment and to make the necessary changes to meet voltage sag standards.  Tests are done in accordance with the SEMI Standard F42: "Test Method for Voltage Sag Susceptibility of Semiconductor Processing Equipment." The voltage-sag hardware allows for testing of loads up to 200 Amp, three phase.  Through subsystem testing, our voltage-sag hardware has been successfully used to test multi-chamber semiconductor tools with loads up to 300 Amps per phase, 480 Vac.

EPRI documents the testing with a test report and if the tool is found to be compliant to SEMI F47, compliance documentation is supplied at no additional charge.  We are committed to helping you comply with SEMI F47.  We count your success in meeting the SEMI F47 standard as our success as well.