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Latest Compliance News!
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The members of our web site are privileged to exclusive content that helps them design or purchase equipment that is compliant with power quality standards such as SEMI
F47 and IEC 61000-4-34. We have decided to periodically post a list of select tools, components, and power conditioners that we have recently certified through our PQStar testing program . For our members, we include the contact information to link you up directly with the e-mail and phone number we worked with at
the subject company. Here, we now list the items we have certified without the contact data. If you would like to know the information, you can request the contact
information from us at mstephens@epri.com.
Our clients are eligible to access our members area of the www.f47testing.com web site. Find out more about the benefits of membership and
choosing EPRI as your power quality standards compliance service provider.
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| Latest SEMI F47 Compliant Components |
| PQ Star Reference Number |
Type Of Equipment |
Make and Model Number |
| SEMIF47.117 |
DC Contactors |
Siemens
Models:
3RT1015-1BB41,-1BB42,-2BB41
3RT1016-1BB41,-1BB42,-2BB41
3RT1017-1BB41,-1BB42,-2BB41 |
| SEMIF47.118 |
DC Contactors |
Siemens
Models:
3RT1023-1BB40,-3BB40
3RT1024-1BB40,-3BB40
3RT1025-1BB40,-3BB40
3RT1026-1BB40,-3BB40 |
| SEMIF47.119 |
DC Contactors |
Siemens
Models:
3RT1033-1BB40,-3BB40
3RT1034-1BB40,-3BB40
3RT1035-1BB40,-3BB40
3RT1036-1BB40,-3BB40 |
| SEMIF47.120 |
DC Contactors |
Siemens
Models:
3RT1044-1BB40,-3BB40
3RT1045-1BB40,-3BB40
3RT1046-1BB40,-3BB40
3RT1446-1BB40 |
| SEMIF47.121 |
AC Contactors |
Siemens
Models:
3RT1054-6AB36,-6AF36,-6AP36
3RT1055-6AB36,-6AF36,-6AP36
3RT1056-6AB36,-6AF36,-6AP36,-6AM36
3RT1456-6AB36,-6AF36,-6AP36,-6AM36 |
| SEMIF47.122 |
AC Contactors |
Siemens
Models:
3RT1064-6AB36,-6AF36,-6AP36
3RT1065-6AB36,-6AF36,-6AP36
3RT1066-6AB36,-6AF36,-6AP36,-6AM36
3RT1466-6AB36,-6AF36,-6AP36,-6AM36 |
| SEMIF47.123 |
AC Contactors |
Siemens
Models:
3RT1264-6AB36,-6AF36,-6AP36
3RT1265-6AB36,-6AF36,-6AP36
3RT1266-6AB36,-6AF36,-6AP36,-6AM36 |
| SEMIF47.124 |
AC Contactors |
Siemens
Models:
3RT1275-6AB36,-6AF36,-6AP36
3RT1276-6AB36,-6AF36,-6AP36,-6AM36 |
| SEMIF47.125 |
AC Contactors |
Siemens
Models:
3RT1075-6AB36,-6AF36,-6AP36
3RT1076-6AB36,-6AF36,-6AP36,-6AM36
3RT1476-6AB36,-6AF36,-6AP36,-6AM36 |
| SEMIF47.127 |
AC Drives |
Rockwell Automation
Models:
75Hp to 200Hp Power Flex 700 Series Drives |
| SEMIF47.132 |
AC Drives |
Schneider-Toshiba Inverter
Models:
3Hp to 100Hp
Altivar 61/71 Series Drives
208Vac
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| SEMIF47.133 |
AC Drives |
Schneider-Toshiba
Models:
5Hp to 150Hp
Altivar 61/71 Series Drives
480Vac
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| Latest SEMI F47 Compliant Tools |
| PQ Star Reference Number |
Tool Type |
Tool Supplier |
Model |
| SEMIF47.126 |
Low Pressure Annealing |
Mattson Technologies, Inc. |
TRIAS LPA |
| SEMIF47.128 |
Clean FEOL (Front-End-Of-Line) |
Confidential |
Confidential |
| SEMIF47.129 |
Remote Chemical Management System (RCMS) |
Confidential |
Confidential |
| SEMIF47.130 |
Chemical Delivery Unit (CDU) – Class 1 |
Confidential |
Confidential |
| SEMI F47.134 |
200mm ECD
Configuration 1 |
Confidential |
Confidential |
| SEMI F47.135 |
200mm ECD
Configuration 2 |
Confidential |
Model: Confidential |
| SEMI F47.136 |
300mm Implanter |
Axcelis Technologies, Inc. |
300mm Optima MD |
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SemiF47 Compliance Testing (PQ Star)
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