SEMI F42 Abstract

With the issue of SEMI F47-0706, SEMI F42 has been superceeded. However, this document can still serve as a guide for testing.

The SEMI F42 document defines the test method used to characterize the susceptibility of semiconductor processing, metrology, and automated test equipment to voltage sags.  The scope of the document is to define the testing procedures as well as the test equipment specifications required to characterize the equipment's response to voltage sags and to qualify the equipment to meet the industry standard.  This methodology document is generic in nature in that it can be used to test against any defined ride-through standard.  The document contains important sections that detail how to conduct voltage sag tests on semiconductor tools.  These sections define:

• The test apparatus requirements
• Safety Precautions
• Sampling and Test Specimens
• Test Setup
• Test Procedure
• Interpretation of Results
• Reporting Test Results

A block diagram of the required voltage sag generator system is shown below.

Voltage Sag Test Fixture