Consultation with EPRI in the equipment/design stage can help tool suppliers meet the SEMI F47 voltage sag standard before the tool is built, or even before the tool is in the prototype stage.
The consulting process involves reviewing tool drawings and subcomponent specifications,
creating single-line diagrams of the subject tool(s), consulting with subcomponent suppliers, and drawing from EPRI' experience to make power quality enhancing suggestions. Based on the review, EPRI
will make recommendations to help the tool meet the SEMI F47 Standard.